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Structural changes and Si redistribution in Si+ implanted s..:

Wendler, E. ; Herrmann, U. ; Wesch, W..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  116 (1996)  1-4 - p. 332-337 , 1996
Link: https://doi.org/10.1016/0168-583x(96)00068-7