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Study of the composition of vacuum deposited thin films of ..:

Khaliquzzaman, M. ; Biswas, S.K. ; Khan, A.H....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  114 (1996)  3-4 - p. 332-336 , 1996
Link: https://doi.org/10.1016/0168-583x(96)00148-6