I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Composition analysis of ECR-grown SiO2 and SiOxFy films:

Burkhart, J.H. ; Denison, D. ; Barbour, J.C..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  118 (1996)  1-4 - p. 698-703 , 1996
Link: https://doi.org/10.1016/0168-583x(96)00255-8