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PN junction formation in 6HSiC by acceptor implantation i..:

Rao, Mulpuri V. ; Gardner, Jason ; Griffiths, Peter...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  106 (1995)  1-4 - p. 333-338 , 1995
Link: https://doi.org/10.1016/0168-583x(96)80026-7