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SOI 'SIMOX'; from bulk to surface micromachining, a new age..:

Diem, B. ; Rey, P. ; Renard, S....
Sensors and Actuators A: Physical.  46 (1995)  1-3 - p. 8-16 , 1995
Link: https://doi.org/10.1016/0924-4247(94)00851-8