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1 Ergebnisse
1
Microelectromechanical Systems, Principles of:
, In:
Encyclopedia of Materials: Science and Technology
,
Galambos, P.
- p. 5598-5609 , 2001
Link:
https://doi.org/10.1016/b0-08-043152-6/00979-7
RT T1 <cTitle>Encyclopedia of Materials: Science and Technology</cTitle>: T1 <Title>Microelectromechanical Systems, Principles of</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b0-08-043152-6_00979-7&Exemplar=1&LAN=DE A1 Galambos, P. PB Elsevier YR 2001 SP 5598 OP 5609 LK http://dx.doi.org/https://doi.org/10.1016/b0-08-043152-6/00979-7 DO https://doi.org/10.1016/b0-08-043152-6/00979-7 SF ELIB - SuUB Bremen
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