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1 Ergebnisse
1
Metallic alloy seal bonding:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Reinert, Wolfgang
;
Kulkarni, Amit
;
Vuorinen, Vesa
.. - p. 609-625 , 2020
Link:
https://doi.org/10.1016/b978-0-12-817786-0.00026-8
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Metallic alloy seal bonding</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-12-817786-0.00026-8&Exemplar=1&LAN=DE A1 Reinert, Wolfgang A1 Kulkarni, Amit A1 Vuorinen, Vesa A1 Lofink, Fabian A1 Merz, Peter PB Elsevier YR 2020 SP 609 OP 625 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-12-817786-0.00026-8 DO https://doi.org/10.1016/b978-0-12-817786-0.00026-8 SF ELIB - SuUB Bremen
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