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1 Ergebnisse
1
Dicing of MEMS devices:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Martin, Devin
;
Sullivan, Scott
;
Bose, Indranil Ronnie
.. - p. 677-689 , 2020
Link:
https://doi.org/10.1016/b978-0-12-817786-0.00031-1
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Dicing of MEMS devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-12-817786-0.00031-1&Exemplar=1&LAN=DE A1 Martin, Devin A1 Sullivan, Scott A1 Bose, Indranil Ronnie A1 Landesberger, Christof A1 Wieland, Robert PB Elsevier YR 2020 SP 677 OP 689 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-12-817786-0.00031-1 DO https://doi.org/10.1016/b978-0-12-817786-0.00031-1 SF ELIB - SuUB Bremen
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