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1 Ergebnisse
1
Outgassing and gettering:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Rizzi, Enea
;
Mauri, Luca
;
Moraja, Marco
... - p. 743-762 , 2015
Link:
https://doi.org/10.1016/b978-0-12-817786-0.00035-9
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Outgassing and gettering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-12-817786-0.00035-9&Exemplar=1&LAN=DE A1 Rizzi, Enea A1 Mauri, Luca A1 Moraja, Marco A1 Conte, Andrea A1 Bonucci, Antonio A1 Longoni, Giorgio A1 Amiotti, Marco PB Elsevier YR 2015 SP 743 OP 762 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-12-817786-0.00035-9 DO https://doi.org/10.1016/b978-0-12-817786-0.00035-9 SF ELIB - SuUB Bremen
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