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Measuring oxygen and bulk microdefects in silicon:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Savin, Hele
;
Kissinger, Gudrun
;
Airaksinen, Veli-Matti
- p. 775-779 , 2020
Link:
https://doi.org/10.1016/b978-0-12-817786-0.00037-2
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Measuring oxygen and bulk microdefects in silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-12-817786-0.00037-2&Exemplar=1&LAN=DE A1 Savin, Hele A1 Kissinger, Gudrun A1 Airaksinen, Veli-Matti PB Elsevier YR 2020 SP 775 OP 779 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-12-817786-0.00037-2 DO https://doi.org/10.1016/b978-0-12-817786-0.00037-2 SF ELIB - SuUB Bremen
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