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MEMS reliability:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Skogström, Lasse
;
Li, Jue
;
Mattila, Toni T.
. - p. 851-876 , 2020
Link:
https://doi.org/10.1016/b978-0-12-817786-0.00044-x
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>MEMS reliability</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-12-817786-0.00044-x&Exemplar=1&LAN=DE A1 Skogström, Lasse A1 Li, Jue A1 Mattila, Toni T. A1 Vuorinen, Vesa PB Elsevier YR 2020 SP 851 OP 876 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-12-817786-0.00044-x DO https://doi.org/10.1016/b978-0-12-817786-0.00044-x SF ELIB - SuUB Bremen
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