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1 Ergebnisse
1
Accelerometer:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Polizzi, Jean-Philippe
;
Fain, Bruno
;
Maspero, Federico
- p. 879-898 , 2020
Link:
https://doi.org/10.1016/b978-0-12-817786-0.00045-1
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Accelerometer</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-12-817786-0.00045-1&Exemplar=1&LAN=DE A1 Polizzi, Jean-Philippe A1 Fain, Bruno A1 Maspero, Federico PB Elsevier YR 2020 SP 879 OP 898 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-12-817786-0.00045-1 DO https://doi.org/10.1016/b978-0-12-817786-0.00045-1 SF ELIB - SuUB Bremen
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