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1 Ergebnisse
1
Modeling of Silicon Etching:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Gosálvez, Miguel A.
- p. 333-353 , 2015
Link:
https://doi.org/10.1016/b978-0-323-29965-7.00012-9
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Modeling of Silicon Etching</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-323-29965-7.00012-9&Exemplar=1&LAN=DE A1 Gosálvez, Miguel A. PB Elsevier YR 2015 SP 333 OP 353 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-323-29965-7.00012-9 DO https://doi.org/10.1016/b978-0-323-29965-7.00012-9 SF ELIB - SuUB Bremen
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