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Introduction to Measuring MEMS:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Airaksinen, Veli-Matti
- p. 377-380 , 2015
Link:
https://doi.org/10.1016/b978-0-323-29965-7.00014-2
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Introduction to Measuring MEMS</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-323-29965-7.00014-2&Exemplar=1&LAN=DE A1 Airaksinen, Veli-Matti PB Elsevier YR 2015 SP 377 OP 380 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-323-29965-7.00014-2 DO https://doi.org/10.1016/b978-0-323-29965-7.00014-2 SF ELIB - SuUB Bremen
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