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1 Ergebnisse
1
Oxygen and Bulk Microdefects in Silicon:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Savin, Hele
;
Airaksinen, Veli-Matti
- p. 421-424 , 2015
Link:
https://doi.org/10.1016/b978-0-323-29965-7.00019-1
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Oxygen and Bulk Microdefects in Silicon</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-323-29965-7.00019-1&Exemplar=1&LAN=DE A1 Savin, Hele A1 Airaksinen, Veli-Matti PB Elsevier YR 2015 SP 421 OP 424 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-323-29965-7.00019-1 DO https://doi.org/10.1016/b978-0-323-29965-7.00019-1 SF ELIB - SuUB Bremen
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