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1 Ergebnisse
1
Deep X-ray Lithography:
, In:
Micromanufacturing Engineering and Technology
,
Meyer, P.
;
Schulz, J.
- p. 365-391 , 2015
Link:
https://doi.org/10.1016/b978-0-323-31149-6.00016-5
RT T1 <cTitle>Micromanufacturing Engineering and Technology</cTitle>: T1 <Title>Deep X-ray Lithography</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-323-31149-6.00016-5&Exemplar=1&LAN=DE A1 Meyer, P. A1 Schulz, J. PB Elsevier YR 2015 SP 365 OP 391 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-323-31149-6.00016-5 DO https://doi.org/10.1016/b978-0-323-31149-6.00016-5 SF ELIB - SuUB Bremen
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