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1 Ergebnisse
1
Metallic Alloy Seal Bonding:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Reinert, Wolfgang
;
Merz, Peter
- p. 533-542 , 2010
Link:
https://doi.org/10.1016/b978-0-8155-1594-4.00034-6
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Metallic Alloy Seal Bonding</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-8155-1594-4.00034-6&Exemplar=1&LAN=DE A1 Reinert, Wolfgang A1 Merz, Peter PB Elsevier YR 2010 SP 533 OP 542 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-8155-1594-4.00034-6 DO https://doi.org/10.1016/b978-0-8155-1594-4.00034-6 SF ELIB - SuUB Bremen
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