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1 Ergebnisse
1
Outgassing and Gettering:
, In:
Handbook of Silicon Based MEMS Materials and Technologies
,
Bonucci, Antonio
;
Conte, Andrea
;
Moraja, Marco
.. - p. 585-599 , 2010
Link:
https://doi.org/10.1016/b978-0-8155-1594-4.00040-1
RT T1 <cTitle>Handbook of Silicon Based MEMS Materials and Technologies</cTitle>: T1 <Title>Outgassing and Gettering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-0-8155-1594-4.00040-1&Exemplar=1&LAN=DE A1 Bonucci, Antonio A1 Conte, Andrea A1 Moraja, Marco A1 Longoni, Giorgio A1 Amiotti, Marco PB Elsevier YR 2010 SP 585 OP 599 LK http://dx.doi.org/https://doi.org/10.1016/b978-0-8155-1594-4.00040-1 DO https://doi.org/10.1016/b978-0-8155-1594-4.00040-1 SF ELIB - SuUB Bremen
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