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1 Ergebnisse
1
Characterization of low dielectric constant materials:
, In:
Interlayer Dielectrics for Semiconductor Technologies
,
Ho, P.S.
;
Liu, J.
;
Morgen, M.
... - p. 37-76 , 2003
Link:
https://doi.org/10.1016/b978-012511221-5/50005-2
RT T1 <cTitle>Interlayer Dielectrics for Semiconductor Technologies</cTitle>: T1 <Title>Characterization of low dielectric constant materials</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-012511221-5_50005-2&Exemplar=1&LAN=DE A1 Ho, P.S. A1 Liu, J. A1 Morgen, M. A1 Kiene, M. A1 Zhao, J.-H. A1 Hu, C. PB Elsevier YR 2003 SP 37 OP 76 LK http://dx.doi.org/https://doi.org/10.1016/b978-012511221-5/50005-2 DO https://doi.org/10.1016/b978-012511221-5/50005-2 SF ELIB - SuUB Bremen
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