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1 Ergebnisse
1
High-k dielectrics grown by atomic layer deposition:
, In:
Interlayer Dielectrics for Semiconductor Technologies
,
Groner, M.D.
;
George, S.M.
- p. 327-348 , 2003
Link:
https://doi.org/10.1016/b978-012511221-5/50012-x
RT T1 <cTitle>Interlayer Dielectrics for Semiconductor Technologies</cTitle>: T1 <Title>High-k dielectrics grown by atomic layer deposition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_b978-012511221-5_50012-x&Exemplar=1&LAN=DE A1 Groner, M.D. A1 George, S.M. PB Elsevier YR 2003 SP 327 OP 348 LK http://dx.doi.org/https://doi.org/10.1016/b978-012511221-5/50012-x DO https://doi.org/10.1016/b978-012511221-5/50012-x SF ELIB - SuUB Bremen
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