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1 Ergebnisse
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Properties of AlN grown by plasma enhanced atomic layer dep..:
Bosund, Markus
;
Sajavaara, Timo
;
Laitinen, Mikko
...
Applied Surface Science. 257 (2011) 17 - p. 7827-7830 , 2011
Link:
https://doi.org/10.1016/j.apsusc.2011.04.037
RT Journal T1
Properties of AlN grown by plasma enhanced atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2011.04.037&Exemplar=1&LAN=DE A1 Bosund, Markus A1 Sajavaara, Timo A1 Laitinen, Mikko A1 Huhtio, Teppo A1 Putkonen, Matti A1 Airaksinen, Veli-Matti A1 Lipsanen, Harri PB Elsevier BV YR 2011 SN 0169-4332 JF Applied Surface Science VO 257 IS 17 SP 7827 OP 7830 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2011.04.037 DO https://doi.org/10.1016/j.apsusc.2011.04.037 SF ELIB - SuUB Bremen
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