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Germanium growth on electron beam lithography patterned Si3..:

Sarkar, Subhendu Sinha ; Katiyar, Ajit K. ; Sarkar, Arijit...
Applied Surface Science.  437 (2018)  - p. 144-151 , 2018
Link: https://doi.org/10.1016/j.apsusc.2017.12.094