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1 Ergebnisse
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3D structure evolution using metastable atomic layer deposi..:
Ziegler, Mario
;
Thamm, Sophie
;
Stolle, H. Lisa K.S.
...
Applied Surface Science. 514 (2020) - p. 145770 , 2020
Link:
https://doi.org/10.1016/j.apsusc.2020.145770
RT Journal T1
3D structure evolution using metastable atomic layer deposition based on planar silver templates
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2020.145770&Exemplar=1&LAN=DE A1 Ziegler, Mario A1 Thamm, Sophie A1 Stolle, H. Lisa K.S. A1 Dellith, J. A1 Hübner, Uwe A1 Wang, Dong A1 Schaaf, Peter PB Elsevier BV YR 2020 SN 0169-4332 JF Applied Surface Science VO 514 SP 145770 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2020.145770 DO https://doi.org/10.1016/j.apsusc.2020.145770 SF ELIB - SuUB Bremen
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