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Investigation of abnormally high growth-per-cycle in atomic..:
Ham, So-Yeon
;
Jin, Zhenyu
;
Shin, Seokhee
...
Applied Surface Science. 571 (2022) - p. 151282 , 2022
Link:
https://doi.org/10.1016/j.apsusc.2021.151282
RT Journal T1
Investigation of abnormally high growth-per-cycle in atomic layer deposition of Al2O3 using trimethylaluminum and water
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2021.151282&Exemplar=1&LAN=DE A1 Ham, So-Yeon A1 Jin, Zhenyu A1 Shin, Seokhee A1 Kim, Minseo A1 Seo, Mingyu A1 Min, Yo-Sep PB Elsevier BV YR 2022 SN 0169-4332 JF Applied Surface Science VO 571 SP 151282 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2021.151282 DO https://doi.org/10.1016/j.apsusc.2021.151282 SF ELIB - SuUB Bremen
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