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1 Ergebnisse
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Fluorine-containing polymeric inhibitor for highly selectiv..:
Kim, Yeon Rae
;
Jeon, In Su
;
Yim, Soonmin
...
Applied Surface Science. 578 (2022) - p. 152056 , 2022
Link:
https://doi.org/10.1016/j.apsusc.2021.152056
RT Journal T1
Fluorine-containing polymeric inhibitor for highly selective and durable area-selective atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2021.152056&Exemplar=1&LAN=DE A1 Kim, Yeon Rae A1 Jeon, In Su A1 Yim, Soonmin A1 Lee, A Hyeon A1 Kim, Seonwoo A1 Kim, Minsu A1 Sohn, Eun-Ho A1 Song, Wooseok A1 Jung, Ha-Kyun A1 Lee, Sun Sook A1 An, Ki-Seok PB Elsevier BV YR 2022 SN 0169-4332 JF Applied Surface Science VO 578 SP 152056 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2021.152056 DO https://doi.org/10.1016/j.apsusc.2021.152056 SF ELIB - SuUB Bremen
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