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Effect of hydrofluorocarbon structure of C3H2F6 isomers on ..:
Tak, Hyun Woo
;
Lee, Hye Joo
;
Wen, Long
...
Applied Surface Science. 600 (2022) - p. 154050 , 2022
Link:
https://doi.org/10.1016/j.apsusc.2022.154050
RT Journal T1
Effect of hydrofluorocarbon structure of C3H2F6 isomers on high aspect ratio etching of silicon oxide
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2022.154050&Exemplar=1&LAN=DE A1 Tak, Hyun Woo A1 Lee, Hye Joo A1 Wen, Long A1 Kang, Byung Jin A1 Sung, Dain A1 Bae, Jeong Woon A1 Kim, Dong Woo A1 Lee, Wonseok A1 Lee, Seung Bae A1 Kim, Keunsuk A1 Cho, Byeong Ok A1 Kim, Young Lea A1 Song, Han Dock A1 Yeom, Geun Young PB Elsevier BV YR 2022 SN 0169-4332 JF Applied Surface Science VO 600 SP 154050 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2022.154050 DO https://doi.org/10.1016/j.apsusc.2022.154050 SF ELIB - SuUB Bremen
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