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Epitaxial growth of NbN thin films for electrodes using ato..:
Young Jang, Seo
;
Min Lee, Hye
;
Young Sung, Ju
...
Applied Surface Science. 636 (2023) - p. 157824 , 2023
Link:
https://doi.org/10.1016/j.apsusc.2023.157824
RT Journal T1
Epitaxial growth of NbN thin films for electrodes using atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2023.157824&Exemplar=1&LAN=DE A1 Young Jang, Seo A1 Min Lee, Hye A1 Young Sung, Ju A1 Eun Kim, Se A1 Deock Jeon, Jae A1 Yun, Yewon A1 Mo Moon, Sang A1 Eun Yoo, Joung A1 Hyeon Choi, Ji A1 Joo Park, Tae A1 Woon Lee, Sang PB Elsevier BV YR 2023 SN 0169-4332 JF Applied Surface Science VO 636 SP 157824 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2023.157824 DO https://doi.org/10.1016/j.apsusc.2023.157824 SF ELIB - SuUB Bremen
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