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1 Ergebnisse
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Nucleation and growth of low resistivity copper thin films ..:
Gao, Zihong
;
Zhang, Chengli
;
Gao, Junhua
...
Applied Surface Science. 638 (2023) - p. 158072 , 2023
Link:
https://doi.org/10.1016/j.apsusc.2023.158072
RT Journal T1
Nucleation and growth of low resistivity copper thin films on polyimide substrates by low-temperature atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2023.158072&Exemplar=1&LAN=DE A1 Gao, Zihong A1 Zhang, Chengli A1 Gao, Junhua A1 Wang, Qiang A1 Xu, Guanglong A1 Cao, Hongtao A1 Zhang, Hongliang PB Elsevier BV YR 2023 SN 0169-4332 JF Applied Surface Science VO 638 SP 158072 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2023.158072 DO https://doi.org/10.1016/j.apsusc.2023.158072 SF ELIB - SuUB Bremen
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