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1 Ergebnisse
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Low temperature crystallization of atomic-layer-deposited S..:
Chung, Hong Keun
;
Jeon, Jihoon
;
Kim, Han
...
Applied Surface Science. 664 (2024) - p. 160243 , 2024
Link:
https://doi.org/10.1016/j.apsusc.2024.160243
RT Journal T1
Low temperature crystallization of atomic-layer-deposited SrTiO3 films with an extremely low equivalent oxide thickness of sub-0.4 nm
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.apsusc.2024.160243&Exemplar=1&LAN=DE A1 Chung, Hong Keun A1 Jeon, Jihoon A1 Kim, Han A1 Jang, Myoungsu A1 Kim, Sung-Chul A1 Won, Sung Ok A1 Baek, In-Hwan A1 Chung, Yoon Jang A1 Han, Jeong Hwan A1 Cho, Sung Haeng A1 Park, Tae Joo A1 Kim, Seong Keun PB Elsevier BV YR 2024 SN 0169-4332 JF Applied Surface Science VO 664 SP 160243 LK http://dx.doi.org/https://doi.org/10.1016/j.apsusc.2024.160243 DO https://doi.org/10.1016/j.apsusc.2024.160243 SF ELIB - SuUB Bremen
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