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Extremely high selective Si1−xGex-film wet etchant generati..:
Lee, Seung-Jae
;
Lee, Ji-Eun
;
Lee, Chang-Jin
...
Chemical Engineering Journal. 475 (2023) - p. 146257 , 2023
Link:
https://doi.org/10.1016/j.cej.2023.146257
RT Journal T1
Extremely high selective Si1−xGex-film wet etchant generating highly dissolved oxygen via peracetic acid oxidant for lateral gate-all-around FETs with a logic node of less than 3-nm
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.cej.2023.146257&Exemplar=1&LAN=DE A1 Lee, Seung-Jae A1 Lee, Ji-Eun A1 Lee, Chang-Jin A1 Kim, Ji-Hoon A1 Kim, Ji-Hun A1 Kim, Min-Won A1 Choi, Ji-Ho A1 Jeong, Ui-Hyun A1 Park, Jea-Gun PB Elsevier BV YR 2023 SN 1385-8947 JF Chemical Engineering Journal VO 475 SP 146257 LK http://dx.doi.org/https://doi.org/10.1016/j.cej.2023.146257 DO https://doi.org/10.1016/j.cej.2023.146257 SF ELIB - SuUB Bremen
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