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1 Ergebnisse
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Atomic layer deposition of molybdenum oxide using (N Bu)2(N..:
Lee, Seunghwan
;
Yang, Hae Lin
;
Kim, Beomseok
...
Ceramics International. 49 (2023) 3 - p. 5292-5297 , 2023
Link:
https://doi.org/10.1016/j.ceramint.2022.10.047
RT Journal T1
Atomic layer deposition of molybdenum oxide using (N Bu)2(NMe2)2Mo, hydrogen peroxide (H2O2), and ozone (O3) for DRAM application
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.ceramint.2022.10.047&Exemplar=1&LAN=DE A1 Lee, Seunghwan A1 Yang, Hae Lin A1 Kim, Beomseok A1 Lee, Jinho A1 Lim, Hanjin A1 Park, Jin-Seong PB Elsevier BV YR 2023 SN 0272-8842 JF Ceramics International VO 49 IS 3 SP 5292 OP 5297 LK http://dx.doi.org/https://doi.org/10.1016/j.ceramint.2022.10.047 DO https://doi.org/10.1016/j.ceramint.2022.10.047 SF ELIB - SuUB Bremen
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