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PEALD deposited aluminum hafnium mixed oxide dielectrics fo..:
Chen, Han-Bin
;
Wu, Wan-Yu
;
Wang, Yao-Tian
...
Ceramics International. 50 (2024) 3 - p. 5350-5362 , 2024
Link:
https://doi.org/10.1016/j.ceramint.2023.11.286
RT Journal T1 <Title>PEALD deposited aluminum hafnium mixed oxide dielectrics for amorphous-IGZO TFTs</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.ceramint.2023.11.286&Exemplar=1&LAN=DE A1 Chen, Han-Bin A1 Wu, Wan-Yu A1 Wang, Yao-Tian A1 Yan, Jia-Hao A1 Zhao, Ming-Jie A1 Zhang, Xiao-Ying A1 Gao, Peng A1 Wuu, Dong-Sing A1 Lai, Feng-Min A1 Lien, Shui-Yang A1 Zhu, Wen-Zhang PB Elsevier BV YR 2024 SN 0272-8842 JF Ceramics International VO 50 IS 3 SP 5350 OP 5362 LK http://dx.doi.org/https://doi.org/10.1016/j.ceramint.2023.11.286 DO https://doi.org/10.1016/j.ceramint.2023.11.286 SF ELIB - SuUB Bremen
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