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Removal of EUV exposed hydrocarbon from Ru capping layer of..:

Kim, Min-Su ; Purushothaman, Muthukrishnan ; Kim, Hyun-Tae...
Colloids and Surfaces A: Physicochemical and Engineering Aspects.  555 (2018)  - p. 72-79 , 2018
Link: https://doi.org/10.1016/j.colsurfa.2018.06.067