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Microwave analysis of PACVD diamond deposition reactor base..:
Silva, François
;
Bonnin, Xavier
;
Scharpf, Jochen
.
Diamond and Related Materials. 19 (2010) 5-6 - p. 397-403 , 2010
Link:
https://doi.org/10.1016/j.diamond.2009.10.032
RT Journal T1
Microwave analysis of PACVD diamond deposition reactor based on electromagnetic modelling
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.diamond.2009.10.032&Exemplar=1&LAN=DE A1 Silva, François A1 Bonnin, Xavier A1 Scharpf, Jochen A1 Pasquarelli, Alberto PB Elsevier BV YR 2010 SN 0925-9635 JF Diamond and Related Materials VO 19 IS 5-6 SP 397 OP 403 LK http://dx.doi.org/https://doi.org/10.1016/j.diamond.2009.10.032 DO https://doi.org/10.1016/j.diamond.2009.10.032 SF ELIB - SuUB Bremen
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