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1 Ergebnisse
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Stress relaxation of three dimensional textured AlN films o..:
Chen, Yanpu
;
Zhu, Zishu
;
Zhou, Haolei
...
Diamond and Related Materials. 118 (2021) - p. 108532 , 2021
Link:
https://doi.org/10.1016/j.diamond.2021.108532
RT Journal T1
Stress relaxation of three dimensional textured AlN films on sapphire substrate by rapid thermal annealing
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.diamond.2021.108532&Exemplar=1&LAN=DE A1 Chen, Yanpu A1 Zhu, Zishu A1 Zhou, Haolei A1 Ma, Pingping A1 Lou, Liren A1 Zhu, Wei A1 Wang, Guanzhong PB Elsevier BV YR 2021 SN 0925-9635 JF Diamond and Related Materials VO 118 SP 108532 LK http://dx.doi.org/https://doi.org/10.1016/j.diamond.2021.108532 DO https://doi.org/10.1016/j.diamond.2021.108532 SF ELIB - SuUB Bremen
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