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1 Ergebnisse
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Influence of hydrogen gas flow ratio on the properties of s..:
Sasaki, Yuya
;
Osanai, Hiroya
;
Ohtani, Yusuke
...
Diamond and Related Materials. 123 (2022) - p. 108878 , 2022
Link:
https://doi.org/10.1016/j.diamond.2022.108878
RT Journal T1
Influence of hydrogen gas flow ratio on the properties of silicon- and nitrogen-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.diamond.2022.108878&Exemplar=1&LAN=DE A1 Sasaki, Yuya A1 Osanai, Hiroya A1 Ohtani, Yusuke A1 Murono, Yuta A1 Sato, Masayoshi A1 Kobayashi, Yasuyuki A1 Enta, Yoshiharu A1 Suzuki, Yushi A1 Nakazawa, Hideki PB Elsevier BV YR 2022 SN 0925-9635 JF Diamond and Related Materials VO 123 SP 108878 LK http://dx.doi.org/https://doi.org/10.1016/j.diamond.2022.108878 DO https://doi.org/10.1016/j.diamond.2022.108878 SF ELIB - SuUB Bremen
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