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1 Ergebnisse
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Influence of bias voltage on the microstructure, mechanical..:
Ding, Ji Cheng
;
Wang, Qi Min
;
Liu, Zhe Ren
...
Journal of Alloys and Compounds. 772 (2019) - p. 112-121 , 2019
Link:
https://doi.org/10.1016/j.jallcom.2018.09.063
RT Journal T1
Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jallcom.2018.09.063&Exemplar=1&LAN=DE A1 Ding, Ji Cheng A1 Wang, Qi Min A1 Liu, Zhe Ren A1 Jeong, Seonhee A1 Zhang, Teng Fei A1 Kim, Kwang Ho PB Elsevier BV YR 2019 SN 0925-8388 JF Journal of Alloys and Compounds VO 772 SP 112 OP 121 LK http://dx.doi.org/https://doi.org/10.1016/j.jallcom.2018.09.063 DO https://doi.org/10.1016/j.jallcom.2018.09.063 SF ELIB - SuUB Bremen
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