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1 Ergebnisse
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Numerical studies on PACVD processes used for TiN multifunc..:
Son, Seok-Jae
;
Yi, Kyung-Woo
;
Joo, Jung-Hoon
..
Journal of Crystal Growth. 310 (2008) 7-9 - p. 1697-1702 , 2008
Link:
https://doi.org/10.1016/j.jcrysgro.2007.11.163
RT Journal T1
Numerical studies on PACVD processes used for TiN multifunctional films using metal organic precursors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jcrysgro.2007.11.163&Exemplar=1&LAN=DE A1 Son, Seok-Jae A1 Yi, Kyung-Woo A1 Joo, Jung-Hoon A1 Mahrholz, J. A1 Rie, K.-T. PB Elsevier BV YR 2008 SN 0022-0248 JF Journal of Crystal Growth VO 310 IS 7-9 SP 1697 OP 1702 LK http://dx.doi.org/https://doi.org/10.1016/j.jcrysgro.2007.11.163 DO https://doi.org/10.1016/j.jcrysgro.2007.11.163 SF ELIB - SuUB Bremen
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