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1 Ergebnisse
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Full-wafer mapping and response surface modeling techniques..:
León, María del Pilar
;
Adomaitis, Raymond A.
Journal of Crystal Growth. 311 (2009) 13 - p. 3399-3408 , 2009
Link:
https://doi.org/10.1016/j.jcrysgro.2009.02.032
RT Journal T1
Full-wafer mapping and response surface modeling techniques for thin film deposition processes
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jcrysgro.2009.02.032&Exemplar=1&LAN=DE A1 León, María del Pilar A1 Adomaitis, Raymond A. PB Elsevier BV YR 2009 SN 0022-0248 JF Journal of Crystal Growth VO 311 IS 13 SP 3399 OP 3408 LK http://dx.doi.org/https://doi.org/10.1016/j.jcrysgro.2009.02.032 DO https://doi.org/10.1016/j.jcrysgro.2009.02.032 SF ELIB - SuUB Bremen
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