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Solid phase epitaxy of amorphous Ge films deposited by PECV:
Ma, Quan-Bao
;
Lieten, Ruben
;
Leys, Maarten
...
Journal of Crystal Growth. 331 (2011) 1 - p. 40-43 , 2011
Link:
https://doi.org/10.1016/j.jcrysgro.2011.07.014
RT Journal T1
Solid phase epitaxy of amorphous Ge films deposited by PECVD
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jcrysgro.2011.07.014&Exemplar=1&LAN=DE A1 Ma, Quan-Bao A1 Lieten, Ruben A1 Leys, Maarten A1 Degroote, Stefan A1 Germain, Marianne A1 Borghs, Gustaaf PB Elsevier BV YR 2011 SN 0022-0248 JF Journal of Crystal Growth VO 331 IS 1 SP 40 OP 43 LK http://dx.doi.org/https://doi.org/10.1016/j.jcrysgro.2011.07.014 DO https://doi.org/10.1016/j.jcrysgro.2011.07.014 SF ELIB - SuUB Bremen
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