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1 Ergebnisse
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A green scheduling model for two-stage photo-etching and ac..:
Kong, Min
;
Zhang, Yajing
;
Xu, Jin
...
Journal of Industrial Information Integration. 41 (2024) - p. 100655 , 2024
Link:
https://doi.org/10.1016/j.jii.2024.100655
RT Journal T1 <Title>A green scheduling model for two-stage photo-etching and acid-etching collaboration in semiconductor manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jii.2024.100655&Exemplar=1&LAN=DE A1 Kong, Min A1 Zhang, Yajing A1 Xu, Jin A1 Wang, Weizhong A1 Lu, Shaojun A1 Fathollahi-Fard, Amir M. PB Elsevier BV YR 2024 SN 2452-414X JF Journal of Industrial Information Integration VO 41 SP 100655 LK http://dx.doi.org/https://doi.org/10.1016/j.jii.2024.100655 DO https://doi.org/10.1016/j.jii.2024.100655 SF ELIB - SuUB Bremen
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