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1 Ergebnisse
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Characterization and control of energetic deposits from hex..:
Nguyen, Thanh-Trung
;
Lin, Yu-Jhen
;
Chin, Mo-Geng
...
Journal of Loss Prevention in the Process Industries. 65 (2020) - p. 104127 , 2020
Link:
https://doi.org/10.1016/j.jlp.2020.104127
RT Journal T1 <Title>Characterization and control of energetic deposits from hexachlorodisilane in process tool exhaust lines</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jlp.2020.104127&Exemplar=1&LAN=DE A1 Nguyen, Thanh-Trung A1 Lin, Yu-Jhen A1 Chin, Mo-Geng A1 Wang, Cheng-Chieh A1 Tsai, Hsiao-Yun A1 Chen, Jenq-Renn A1 Ngai, Eugene Y. A1 Chacon, Jennyfer A1 Franzi, Albert A1 Fifield, Christian A1 Baylor, Jason A1 Marci, John A1 Bitner, Justin A1 Prettyman, Kevin M. A1 Ferrera, Nicholas A1 Jordon, William A1 Szekeres, Trevor PB Elsevier BV YR 2020 SN 0950-4230 JF Journal of Loss Prevention in the Process Industries VO 65 SP 104127 LK http://dx.doi.org/https://doi.org/10.1016/j.jlp.2020.104127 DO https://doi.org/10.1016/j.jlp.2020.104127 SF ELIB - SuUB Bremen
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