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Disposal of hexachlorodisilane and its hydrolyzed deposits:

Lin, Yu-Jhen ; Nguyen, Thanh-Trung ; Chin, Mo-Geng...
Journal of Loss Prevention in the Process Industries.  65 (2020)  - p. 104136 , 2020
Link: https://doi.org/10.1016/j.jlp.2020.104136