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1 Ergebnisse
1
Surface and subsurface integrity of monocrystalline silicon..:
Chen, Zhaojie
;
Xie, Jin
;
Liu, Junhan
..
Journal of Materials Processing Technology. 322 (2023) - p. 118211 , 2023
Link:
https://doi.org/10.1016/j.jmatprotec.2023.118211
RT Journal T1 <Title>Surface and subsurface integrity of monocrystalline silicon in impulse-discharge driven abrasive machining</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jmatprotec.2023.118211&Exemplar=1&LAN=DE A1 Chen, Zhaojie A1 Xie, Jin A1 Liu, Junhan A1 He, Xiansong A1 Zhou, Cong PB Elsevier BV YR 2023 SN 0924-0136 JF Journal of Materials Processing Technology VO 322 SP 118211 LK http://dx.doi.org/https://doi.org/10.1016/j.jmatprotec.2023.118211 DO https://doi.org/10.1016/j.jmatprotec.2023.118211 SF ELIB - SuUB Bremen
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