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1 Ergebnisse
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Effects of nitrogen flow ratio on the structural, mechanica..:
Lee, Jyh-Wei
;
Chen, Chun-Yen
;
Chen, Yi-Jyun
..
Journal of Materials Research and Technology. 21 (2022) - p. 1890-1902 , 2022
Link:
https://doi.org/10.1016/j.jmrt.2022.10.033
RT Journal T1 <Title>Effects of nitrogen flow ratio on the structural, mechanical, and anticorrosive properties of co-sputtered (NbTaMoW)Nfilms</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jmrt.2022.10.033&Exemplar=1&LAN=DE A1 Lee, Jyh-Wei A1 Chen, Chun-Yen A1 Chen, Yi-Jyun A1 Tzeng, Chin-Han A1 Chen, Yung-I PB Elsevier BV YR 2022 SN 2238-7854 JF Journal of Materials Research and Technology VO 21 SP 1890 OP 1902 LK http://dx.doi.org/https://doi.org/10.1016/j.jmrt.2022.10.033 DO https://doi.org/10.1016/j.jmrt.2022.10.033 SF ELIB - SuUB Bremen
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