I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Helium focused ion beam induced subsurface damage on Si and..:

Chen, Qianhuang ; Gosalvez, Miguel A. ; Li, Qi.
Journal of Materials Research and Technology.  24 (2023)  - p. 3363-3382 , 2023
Link: https://doi.org/10.1016/j.jmrt.2023.03.229