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Plasma power effect on crystallinity and density of AlN fil..:

Zhang, Xiao-Ying ; Peng, Duan-Chen ; Yan, Jia-Hao...
Journal of Materials Research and Technology.  27 (2023)  - p. 4213-4223 , 2023
Link: https://doi.org/10.1016/j.jmrt.2023.10.302