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1 Ergebnisse
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Performance of amorphization AlCrTiZrMo high entropy alloy ..:
Chen, Shunian
;
Zhang, Yifan
;
Chen, Lin
..
Journal of Materials Research and Technology. 28 (2024) - p. 2868-2875 , 2024
Link:
https://doi.org/10.1016/j.jmrt.2023.12.145
RT Journal T1 <Title>Performance of amorphization AlCrTiZrMo high entropy alloy barrier for copper metallization</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jmrt.2023.12.145&Exemplar=1&LAN=DE A1 Chen, Shunian A1 Zhang, Yifan A1 Chen, Lin A1 Ouyang, Xiaoping A1 Liao, Bin PB Elsevier BV YR 2024 SN 2238-7854 JF Journal of Materials Research and Technology VO 28 SP 2868 OP 2875 LK http://dx.doi.org/https://doi.org/10.1016/j.jmrt.2023.12.145 DO https://doi.org/10.1016/j.jmrt.2023.12.145 SF ELIB - SuUB Bremen
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