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1 Ergebnisse
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Microstructure of hydrogenated silicon carbide thin films p..:
Köhler, F.
;
Chen, T.
;
Nuys, M.
...
Journal of Non-Crystalline Solids. 358 (2012) 17 - p. 2011-2014 , 2012
Link:
https://doi.org/10.1016/j.jnoncrysol.2011.12.057
RT Journal T1 <Title>Microstructure of hydrogenated silicon carbide thin films prepared by chemical vapour deposition techniques</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jnoncrysol.2011.12.057&Exemplar=1&LAN=DE A1 Köhler, F. A1 Chen, T. A1 Nuys, M. A1 Heidt, A. A1 Luysberg, M. A1 Finger, F. A1 Carius, R. PB Elsevier BV YR 2012 SN 0022-3093 JF Journal of Non-Crystalline Solids VO 358 IS 17 SP 2011 OP 2014 LK http://dx.doi.org/https://doi.org/10.1016/j.jnoncrysol.2011.12.057 DO https://doi.org/10.1016/j.jnoncrysol.2011.12.057 SF ELIB - SuUB Bremen
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