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1 Ergebnisse
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Evolution of physical and mechanical properties of fused si..:
Ma, Youze
;
Zheng, Qiuju
;
Wang, Fang
...
Journal of Non-Crystalline Solids. 616 (2023) - p. 122475 , 2023
Link:
https://doi.org/10.1016/j.jnoncrysol.2023.122475
RT Journal T1
Evolution of physical and mechanical properties of fused silica after subsurface damage layer removal by RIE treatment
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.jnoncrysol.2023.122475&Exemplar=1&LAN=DE A1 Ma, Youze A1 Zheng, Qiuju A1 Wang, Fang A1 Sun, Laixi A1 Yu, Jiaxin A1 He, Hongtu PB Elsevier BV YR 2023 SN 0022-3093 JF Journal of Non-Crystalline Solids VO 616 SP 122475 LK http://dx.doi.org/https://doi.org/10.1016/j.jnoncrysol.2023.122475 DO https://doi.org/10.1016/j.jnoncrysol.2023.122475 SF ELIB - SuUB Bremen
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